The Spring 1999 SiWEDS Review meeting will be held at the Poco Diablo Resort in Sedona AZ on Monday&Tuesday April 26&27, 1999. The meeting will be hosted by Dieter Schroder of Arizona State University. A social dinner is scheduled for Monday evening.

The Poco Diablo Resort (http://www.pocodiablo.com) is about 100 miles from Phoenix, AZ and can be reached by:

phone: (800) 528-4275 or (520) 282-7333,

fax: (520) 282-9712,

e-mail: poco@sedona.net.

All those planning on attending the meeting need to make their own reservations. SiWEDS meeting participants will receive a reduced room rate of $145 per night. For more detailed travel directions click on "TRAVEL INFORMATION" below (to display this information you need the Acrobat Reader application, as this is a PDF file). Please complete and submit the "MEETING REGISTRATION FORM" (click on link below).

The program for this Review Meeting is not yet finalized. However, version 2 of the program is available on this Web-site by clicking on "SEDONA PROGRAM" link below.
Dr. K.V. Ravi from INTEL, representing our newest SiWEDS member company and the first IC Manufacturer to join SiWEDS, has agreed to give the keynote talk. He will address the impending conflict between the need for wafer price reductions and the implied technology needs outlined in the SIA roadmap.

Other industry speakers will reflect the emphasis of this meeting on the Metrology Task. They are:

1. Dr. Andrzej Buczkowski from Mitsubishi Silicon America, who will outline basic issues considered by the SiWEDS Profs, with regard to applications of Photoluminescence Mapping, Frequency-Resolved SPV (for Epi characterization), and Corona Oxide Characterization, and
2. Dr. Peter Wagner from Wacker Siltronic, Germany, whose title will be "Impact of Future Si Wafer Specifications Metrology Requirements". He will mainly deal with the consequences resulting from the SIA roadmap with respect to geometry measurement, roughness measurements, and surface inspection.
3. Dr. Jean-Francois Daviet from Mattson Technology, whose title will be "Control of Rapid Thermal Annealing Induced Defects and Impurities".

In case you would like to suggest any guests or speakers for this meeting, please inform Dieter Schroder or George Rozgonyi.

"SEDONA PROGRAM"

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